Current Research Focus
MEMS Device Simuation using MEMCAD . (See also The Semiconductor Subway). MEMS material property characterization with special test structures using an electrostatic pull-in approach. Also, automated construction of MEMS 3D solid models for visualization, FEM meshing, FEA analysis and 3D MEMCAD analysis.
- MemBuilder for MEMCAD (automated 3D solid model construction)
- Electrostatic pull-in modeling of MEMS test structures (for material property measurement and extraction) using specially developed 1D, 2D and closed-form analytical models and MATLAB scripts